{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on Pt(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0658, "q": 41.71, "mu": 1.508, "epsilonL": 8.094e-07, "Eth": 34.1}, "E_min": 34.1, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
34.1	2.704e-26	
40.13	0.0009265	
47.23	0.003498	
55.59	0.008545	
65.43	0.01742	
77.01	0.03206	
90.64	0.05501	
106.7	0.08949	
125.6	0.1391	
147.8	0.2074	
173.9	0.2971	
204.7	0.4098	
240.9	0.545	
283.5	0.7007	
333.7	0.8738	
392.8	1.061	
462.3	1.26	
544.1	1.468	
640.4	1.686	
753.7	1.913	
887.0	2.15	
1044.0	2.398	
1229.0	2.658	
1446.0	2.932	
1702.0	3.221	
2003.0	3.527	
2358.0	3.849	
2775.0	4.189	
3266.0	4.547	
3844.0	4.924	
4524.0	5.319	
5325.0	5.733	
6267.0	6.165	
7376.0	6.614	
8681.0	7.08	
10220.0	7.561	
12030.0	8.056	
14150.0	8.562	
16660.0	9.079	
19610.0	9.604	
23080.0	10.13	
27160.0	10.67	
31970.0	11.2	
37620.0	11.72	
44280.0	12.24	
52110.0	12.75	
61340.0	13.24	
72190.0	13.72	
84960.0	14.16	
-----