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Plasma-Surface Interaction Data Set 494

Sputtering of Kr+ on Pt(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr+ on Pt(pc) at 300 K

angle = 0.0 deg E /eV P
27.941.848e-33
33.010.000295
39.010.001594
46.110.00491
54.490.01198
64.390.02558
76.090.04981
89.920.09003
106.30.1521
125.60.2405
148.40.3565
175.40.4966
207.30.6543
244.90.8221
289.40.9946
342.01.169
404.21.345
477.71.525
564.51.709
667.11.9
788.32.099
931.62.309
1101.02.53
1301.02.764
1538.03.011
1817.03.271
2147.03.546
2537.03.834
2999.04.137
3544.04.452
4188.04.781
4949.05.121
5848.05.473
6911.05.835
8168.06.205
9652.06.582
11410.06.964
13480.07.349
15930.07.734
18820.08.117
22250.08.496
26290.08.868
31070.09.23
36710.09.578
43390.09.909
51270.010.22
60590.010.51
71610.010.77
84620.010.99

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 27.94 – 100000