{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Kr+ on Pt(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1087, "q": 29.48, "mu": 1.953, "epsilonL": 1.501e-06, "Eth": 27.94}, "E_min": 27.94, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
27.94	1.848e-33	
33.01	0.000295	
39.01	0.001594	
46.11	0.00491	
54.49	0.01198	
64.39	0.02558	
76.09	0.04981	
89.92	0.09003	
106.3	0.1521	
125.6	0.2405	
148.4	0.3565	
175.4	0.4966	
207.3	0.6543	
244.9	0.8221	
289.4	0.9946	
342.0	1.169	
404.2	1.345	
477.7	1.525	
564.5	1.709	
667.1	1.9	
788.3	2.099	
931.6	2.309	
1101.0	2.53	
1301.0	2.764	
1538.0	3.011	
1817.0	3.271	
2147.0	3.546	
2537.0	3.834	
2999.0	4.137	
3544.0	4.452	
4188.0	4.781	
4949.0	5.121	
5848.0	5.473	
6911.0	5.835	
8168.0	6.205	
9652.0	6.582	
11410.0	6.964	
13480.0	7.349	
15930.0	7.734	
18820.0	8.117	
22250.0	8.496	
26290.0	8.868	
31070.0	9.23	
36710.0	9.578	
43390.0	9.909	
51270.0	10.22	
60590.0	10.51	
71610.0	10.77	
84620.0	10.99	
-----