pwiDB

Plasma-Surface Interaction Data Set 491

Sputtering of O⁺ on Pt(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of O⁺ on Pt(pc) at 300 K

angle = 0.0 deg	E /eV	P
	31.51	0.0
	37.15	0.0002575
	43.79	0.001452
	51.62	0.004535
	60.85	0.01098
	71.74	0.02269
	84.57	0.04153
	99.69	0.06833
	117.5	0.1021
	138.5	0.1401
	163.3	0.1793
	192.5	0.2177
	227.0	0.2541
	267.6	0.2888
	315.4	0.3221
	371.8	0.3546
	438.3	0.3868
	516.7	0.4192
	609.2	0.452
	718.1	0.4854
	846.5	0.5194
	998.0	0.554
	1176.0	0.5893
	1387.0	0.6251
	1635.0	0.6613
	1927.0	0.6977
	2272.0	0.7342
	2678.0	0.7705
	3157.0	0.8064
	3722.0	0.8417
	4388.0	0.8761
	5173.0	0.9093
	6098.0	0.941
	7188.0	0.9709
	8474.0	0.9987
	9990.0	1.024
	11780.0	1.047
	13880.0	1.066
	16370.0	1.082
	19290.0	1.094
	22740.0	1.101
	26810.0	1.105
	31610.0	1.103
	37260.0	1.097
	43920.0	1.085
	51780.0	1.068
	61040.0	1.047
	71960.0	1.02
	84830.0	0.9891

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0785
q = 2.825
mu = 2.022
epsilonL = 1.021e-05
Eth = 31.51

Fit range

E = 31.51 – 100000