{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "O+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of O+ on Pt(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0785, "q": 2.825, "mu": 2.022, "epsilonL": 1.021e-05, "Eth": 31.51}, "E_min": 31.51, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
31.51	0.0	
37.15	0.0002575	
43.79	0.001452	
51.62	0.004535	
60.85	0.01098	
71.74	0.02269	
84.57	0.04153	
99.69	0.06833	
117.5	0.1021	
138.5	0.1401	
163.3	0.1793	
192.5	0.2177	
227.0	0.2541	
267.6	0.2888	
315.4	0.3221	
371.8	0.3546	
438.3	0.3868	
516.7	0.4192	
609.2	0.452	
718.1	0.4854	
846.5	0.5194	
998.0	0.554	
1176.0	0.5893	
1387.0	0.6251	
1635.0	0.6613	
1927.0	0.6977	
2272.0	0.7342	
2678.0	0.7705	
3157.0	0.8064	
3722.0	0.8417	
4388.0	0.8761	
5173.0	0.9093	
6098.0	0.941	
7188.0	0.9709	
8474.0	0.9987	
9990.0	1.024	
11780.0	1.047	
13880.0	1.066	
16370.0	1.082	
19290.0	1.094	
22740.0	1.101	
26810.0	1.105	
31610.0	1.103	
37260.0	1.097	
43920.0	1.085	
51780.0	1.068	
61040.0	1.047	
71960.0	1.02	
84830.0	0.9891	
-----