Return to search

Plasma-Surface Interaction Data Set 489

Sputtering of 3He+ on Pt(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Pt(pc) at 300 K

angle = 0.0 deg E /eV P
113.50.0
130.30.0001424
149.70.0005247
171.90.001228
197.40.002368
226.70.004064
260.30.006412
299.00.009443
343.40.0131
394.30.01721
452.80.02155
520.10.02588
597.20.03002
685.90.03382
787.70.03725
904.60.04029
1039.00.04298
1193.00.04535
1370.00.04745
1574.00.0493
1807.00.05095
2075.00.0524
2383.00.05367
2737.00.05478
3143.00.05572
3610.00.0565
4146.00.05711
4761.00.05755
5468.00.05781
6279.00.0579
7211.00.05779
8282.00.0575
9511.00.05701
10920.00.05633
12540.00.05546
14410.00.05441
16540.00.05318
19000.00.05178
21820.00.05022
25060.00.04853
28780.00.04671
33050.00.04479
37960.00.04279
43590.00.04072
50060.00.03862
57490.00.0365
66020.00.03437
75820.00.03226
87080.00.03019

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 113.5 – 100000