{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Pt(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1998, "q": 0.1482, "mu": 1.544, "epsilonL": 4.611e-05, "Eth": 113.5}, "E_min": 113.5, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
113.5	0.0	
130.3	0.0001424	
149.7	0.0005247	
171.9	0.001228	
197.4	0.002368	
226.7	0.004064	
260.3	0.006412	
299.0	0.009443	
343.4	0.0131	
394.3	0.01721	
452.8	0.02155	
520.1	0.02588	
597.2	0.03002	
685.9	0.03382	
787.7	0.03725	
904.6	0.04029	
1039.0	0.04298	
1193.0	0.04535	
1370.0	0.04745	
1574.0	0.0493	
1807.0	0.05095	
2075.0	0.0524	
2383.0	0.05367	
2737.0	0.05478	
3143.0	0.05572	
3610.0	0.0565	
4146.0	0.05711	
4761.0	0.05755	
5468.0	0.05781	
6279.0	0.0579	
7211.0	0.05779	
8282.0	0.0575	
9511.0	0.05701	
10920.0	0.05633	
12540.0	0.05546	
14410.0	0.05441	
16540.0	0.05318	
19000.0	0.05178	
21820.0	0.05022	
25060.0	0.04853	
28780.0	0.04671	
33050.0	0.04479	
37960.0	0.04279	
43590.0	0.04072	
50060.0	0.03862	
57490.0	0.0365	
66020.0	0.03437	
75820.0	0.03226	
87080.0	0.03019	
-----