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Plasma-Surface Interaction Data Set 487

Sputtering of D+ on Pt(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Pt(pc) at 300 K

angle = 0.0 deg E /eV P
166.80.0
190.09.728e-05
216.50.0003532
246.70.0008048
281.10.001493
320.30.002437
365.00.003621
415.90.00498
473.90.006423
540.00.00785
615.30.00918
701.10.01036
798.80.01139
910.20.01225
1037.00.01296
1182.00.01355
1346.00.01403
1534.00.01443
1748.00.01474
1992.00.01498
2270.00.01516
2586.00.01528
2947.00.01535
3358.00.01536
3826.00.01532
4359.00.01523
4967.00.0151
5660.00.01491
6449.00.01468
7348.00.0144
8373.00.01408
9540.00.01373
10870.00.01333
12390.00.0129
14110.00.01245
16080.00.01196
18320.00.01146
20880.00.01095
23790.00.01042
27110.00.009885
30890.00.00935
35190.00.008818
40100.00.008292
45690.00.007777
52070.00.007274
59320.00.006786
67600.00.006315
77020.00.005864
87760.00.005433

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 166.8 – 100000