{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Pt(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.202, "q": 0.0395, "mu": 1.56, "epsilonL": 9.409e-05, "Eth": 166.8}, "E_min": 166.8, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
166.8	0.0	
190.0	9.728e-05	
216.5	0.0003532	
246.7	0.0008048	
281.1	0.001493	
320.3	0.002437	
365.0	0.003621	
415.9	0.00498	
473.9	0.006423	
540.0	0.00785	
615.3	0.00918	
701.1	0.01036	
798.8	0.01139	
910.2	0.01225	
1037.0	0.01296	
1182.0	0.01355	
1346.0	0.01403	
1534.0	0.01443	
1748.0	0.01474	
1992.0	0.01498	
2270.0	0.01516	
2586.0	0.01528	
2947.0	0.01535	
3358.0	0.01536	
3826.0	0.01532	
4359.0	0.01523	
4967.0	0.0151	
5660.0	0.01491	
6449.0	0.01468	
7348.0	0.0144	
8373.0	0.01408	
9540.0	0.01373	
10870.0	0.01333	
12390.0	0.0129	
14110.0	0.01245	
16080.0	0.01196	
18320.0	0.01146	
20880.0	0.01095	
23790.0	0.01042	
27110.0	0.009885	
30890.0	0.00935	
35190.0	0.008818	
40100.0	0.008292	
45690.0	0.007777	
52070.0	0.007274	
59320.0	0.006786	
67600.0	0.006315	
77020.0	0.005864	
87760.0	0.005433	
-----