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Plasma-Surface Interaction Data Set 486

Sputtering of H+ on Pt(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of H+ on Pt(pc) at 300 K

angle = 0.0 deg E /eV P
325.05.698e-27
365.32.78e-05
410.79.479e-05
461.60.000208
518.80.000378
583.20.000614
655.50.0009208
736.80.001295
828.20.001725
930.90.002189
1046.00.002662
1176.00.003119
1322.00.003539
1486.00.00391
1670.00.004226
1878.00.004487
2110.00.004697
2372.00.00486
2666.00.004982
2997.00.005069
3369.00.005125
3787.00.005154
4256.00.005159
4784.00.005143
5377.00.005108
6044.00.005055
6794.00.004987
7637.00.004904
8584.00.004807
9648.00.004699
10850.00.004579
12190.00.004449
13700.00.004311
15400.00.004165
17310.00.004013
19460.00.003856
21870.00.003696
24590.00.003533
27630.00.003368
31060.00.003204
34910.00.00304
39240.00.002878
44110.00.002718
49580.00.002562
55730.00.002409
62650.00.002262
70420.00.002119
79150.00.001982
88970.00.00185

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 325 – 100000