{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Pt", "surface_phase": "pc", "species": {"text": "H+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of H+ on Pt(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.4428, "q": 0.0136, "mu": 1.498, "epsilonL": 9.457e-05, "Eth": 325}, "E_min": 325, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
325.0	5.698e-27	
365.3	2.78e-05	
410.7	9.479e-05	
461.6	0.000208	
518.8	0.000378	
583.2	0.000614	
655.5	0.0009208	
736.8	0.001295	
828.2	0.001725	
930.9	0.002189	
1046.0	0.002662	
1176.0	0.003119	
1322.0	0.003539	
1486.0	0.00391	
1670.0	0.004226	
1878.0	0.004487	
2110.0	0.004697	
2372.0	0.00486	
2666.0	0.004982	
2997.0	0.005069	
3369.0	0.005125	
3787.0	0.005154	
4256.0	0.005159	
4784.0	0.005143	
5377.0	0.005108	
6044.0	0.005055	
6794.0	0.004987	
7637.0	0.004904	
8584.0	0.004807	
9648.0	0.004699	
10850.0	0.004579	
12190.0	0.004449	
13700.0	0.004311	
15400.0	0.004165	
17310.0	0.004013	
19460.0	0.003856	
21870.0	0.003696	
24590.0	0.003533	
27630.0	0.003368	
31060.0	0.003204	
34910.0	0.00304	
39240.0	0.002878	
44110.0	0.002718	
49580.0	0.002562	
55730.0	0.002409	
62650.0	0.002262	
70420.0	0.002119	
79150.0	0.001982	
88970.0	0.00185	
-----