pwiDB

Plasma-Surface Interaction Data Set 485

Sputtering of Xe⁺ on Ir(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on Ir(pc) at 300 K

angle = 0.0 deg	E /eV	P
	34.05	1.166e-43
	40.08	3.272e-05
	47.17	0.0002853
	55.52	0.001189
	65.35	0.003665
	76.91	0.009527
	90.53	0.02206
	106.6	0.0465
	125.4	0.08969
	147.6	0.1577
	173.7	0.2519
	204.5	0.3663
	240.7	0.4904
	283.3	0.6155
	333.4	0.7376
	392.4	0.8566
	461.9	0.9749
	543.6	1.095
	639.8	1.22
	753.1	1.35
	886.3	1.489
	1043.0	1.637
	1228.0	1.795
	1445.0	1.964
	1701.0	2.145
	2002.0	2.337
	2356.0	2.542
	2773.0	2.76
	3264.0	2.991
	3842.0	3.234
	4522.0	3.49
	5322.0	3.759
	6264.0	4.04
	7373.0	4.332
	8678.0	4.635
	10210.0	4.949
	12020.0	5.272
	14150.0	5.602
	16650.0	5.939
	19600.0	6.281
	23070.0	6.627
	27150.0	6.973
	31960.0	7.32
	37620.0	7.663
	44270.0	8.001
	52110.0	8.332
	61330.0	8.652
	72190.0	8.959
	84960.0	9.251

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1933
q = 27.19
mu = 2.575
epsilonL = 8.169e-07
Eth = 34.05

Fit range

E = 34.05 – 100000