{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ir", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Xe+ on Ir(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1933, "q": 27.19, "mu": 2.575, "epsilonL": 8.169e-07, "Eth": 34.05}, "E_min": 34.05, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
34.05	1.166e-43	
40.08	3.272e-05	
47.17	0.0002853	
55.52	0.001189	
65.35	0.003665	
76.91	0.009527	
90.53	0.02206	
106.6	0.0465	
125.4	0.08969	
147.6	0.1577	
173.7	0.2519	
204.5	0.3663	
240.7	0.4904	
283.3	0.6155	
333.4	0.7376	
392.4	0.8566	
461.9	0.9749	
543.6	1.095	
639.8	1.22	
753.1	1.35	
886.3	1.489	
1043.0	1.637	
1228.0	1.795	
1445.0	1.964	
1701.0	2.145	
2002.0	2.337	
2356.0	2.542	
2773.0	2.76	
3264.0	2.991	
3842.0	3.234	
4522.0	3.49	
5322.0	3.759	
6264.0	4.04	
7373.0	4.332	
8678.0	4.635	
10210.0	4.949	
12020.0	5.272	
14150.0	5.602	
16650.0	5.939	
19600.0	6.281	
23070.0	6.627	
27150.0	6.973	
31960.0	7.32	
37620.0	7.663	
44270.0	8.001	
52110.0	8.332	
61330.0	8.652	
72190.0	8.959	
84960.0	9.251	
-----