pwiDB

Plasma-Surface Interaction Data Set 482

Sputtering of Ne⁺ on Ir(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Ir(pc) at 300 K

angle = 0.0 deg	E /eV	P
	32.77	0.0
	38.6	0.0002222
	45.46	0.001308
	53.55	0.004208
	63.08	0.01045
	74.3	0.02215
	87.52	0.04161
	103.1	0.07029
	121.4	0.1077
	143.0	0.1511
	168.5	0.197
	198.5	0.2424
	233.8	0.2858
	275.4	0.3271
	324.4	0.3668
	382.1	0.4055
	450.0	0.444
	530.1	0.4827
	624.4	0.522
	735.5	0.5622
	866.4	0.6033
	1020.0	0.6454
	1202.0	0.6885
	1416.0	0.7326
	1668.0	0.7774
	1965.0	0.8228
	2314.0	0.8686
	2726.0	0.9146
	3211.0	0.9605
	3782.0	1.006
	4455.0	1.051
	5247.0	1.095
	6181.0	1.137
	7281.0	1.178
	8576.0	1.217
	10100.0	1.253
	11900.0	1.286
	14020.0	1.316
	16510.0	1.342
	19450.0	1.364
	22910.0	1.381
	26980.0	1.393
	31780.0	1.4
	37440.0	1.401
	44100.0	1.395
	51950.0	1.384
	61190.0	1.366
	72070.0	1.341
	84900.0	1.311

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0847
q = 3.583
mu = 2.078
epsilonL = 8.019e-06
Eth = 32.77

Fit range

E = 32.77 – 100000