{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ir", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Ir(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0847, "q": 3.583, "mu": 2.078, "epsilonL": 8.019e-06, "Eth": 32.77}, "E_min": 32.77, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
32.77	0.0	
38.6	0.0002222	
45.46	0.001308	
53.55	0.004208	
63.08	0.01045	
74.3	0.02215	
87.52	0.04161	
103.1	0.07029	
121.4	0.1077	
143.0	0.1511	
168.5	0.197	
198.5	0.2424	
233.8	0.2858	
275.4	0.3271	
324.4	0.3668	
382.1	0.4055	
450.0	0.444	
530.1	0.4827	
624.4	0.522	
735.5	0.5622	
866.4	0.6033	
1020.0	0.6454	
1202.0	0.6885	
1416.0	0.7326	
1668.0	0.7774	
1965.0	0.8228	
2314.0	0.8686	
2726.0	0.9146	
3211.0	0.9605	
3782.0	1.006	
4455.0	1.051	
5247.0	1.095	
6181.0	1.137	
7281.0	1.178	
8576.0	1.217	
10100.0	1.253	
11900.0	1.286	
14020.0	1.316	
16510.0	1.342	
19450.0	1.364	
22910.0	1.381	
26980.0	1.393	
31780.0	1.4	
37440.0	1.401	
44100.0	1.395	
51950.0	1.384	
61190.0	1.366	
72070.0	1.341	
84900.0	1.311	
-----