Return to search

Plasma-Surface Interaction Data Set 481

Sputtering of 4He+ on Ir(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Ir(pc) at 300 K

angle = 0.0 deg E /eV P
102.70.0
118.10.0002238
136.00.0009015
156.50.002205
180.00.004323
207.20.007374
238.40.01133
274.40.01597
315.70.02097
363.40.02595
418.10.03065
481.20.03492
553.70.03871
637.20.04206
733.30.04502
843.90.04766
971.10.05002
1118.00.05217
1286.00.05412
1480.00.05591
1703.00.05754
1960.00.05902
2255.00.06035
2595.00.06153
2987.00.06256
3437.00.06342
3955.00.06411
4552.00.06462
5238.00.06494
6028.00.06506
6937.00.06497
7983.00.06466
9186.00.06414
10570.00.0634
12170.00.06243
14000.00.06126
16110.00.05987
18540.00.05829
21330.00.05653
24550.00.05461
28250.00.05255
32510.00.05037
37420.00.04809
43060.00.04574
49550.00.04334
57020.00.04092
65620.00.0385
75510.00.0361
86900.00.03373

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 102.7 – 100000