{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ir", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Ir(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1057, "q": 0.1664, "mu": 1.669, "epsilonL": 4.665e-05, "Eth": 102.7}, "E_min": 102.7, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
102.7	0.0	
118.1	0.0002238	
136.0	0.0009015	
156.5	0.002205	
180.0	0.004323	
207.2	0.007374	
238.4	0.01133	
274.4	0.01597	
315.7	0.02097	
363.4	0.02595	
418.1	0.03065	
481.2	0.03492	
553.7	0.03871	
637.2	0.04206	
733.3	0.04502	
843.9	0.04766	
971.1	0.05002	
1118.0	0.05217	
1286.0	0.05412	
1480.0	0.05591	
1703.0	0.05754	
1960.0	0.05902	
2255.0	0.06035	
2595.0	0.06153	
2987.0	0.06256	
3437.0	0.06342	
3955.0	0.06411	
4552.0	0.06462	
5238.0	0.06494	
6028.0	0.06506	
6937.0	0.06497	
7983.0	0.06466	
9186.0	0.06414	
10570.0	0.0634	
12170.0	0.06243	
14000.0	0.06126	
16110.0	0.05987	
18540.0	0.05829	
21330.0	0.05653	
24550.0	0.05461	
28250.0	0.05255	
32510.0	0.05037	
37420.0	0.04809	
43060.0	0.04574	
49550.0	0.04334	
57020.0	0.04092	
65620.0	0.0385	
75510.0	0.0361	
86900.0	0.03373	
-----