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Plasma-Surface Interaction Data Set 480

Sputtering of 3He+ on Ir(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Ir(pc) at 300 K

angle = 0.0 deg E /eV P
134.50.0
153.90.0002244
176.20.0007494
201.60.00164
230.70.00299
264.10.004884
302.20.007371
345.90.01043
395.80.01397
453.00.01783
518.40.02182
593.30.02575
679.00.02947
777.10.0329
889.40.036
1018.00.03875
1165.00.0412
1333.00.04335
1526.00.04526
1746.00.04693
1998.00.04841
2287.00.0497
2617.00.05081
2995.00.05177
3428.00.05256
3923.00.05319
4490.00.05367
5139.00.05398
5881.00.05413
6730.00.05411
7703.00.05392
8815.00.05355
10090.00.05302
11550.00.05231
13210.00.05143
15120.00.05039
17310.00.0492
19810.00.04786
22670.00.04639
25940.00.0448
29690.00.0431
33980.00.04132
38890.00.03948
44510.00.03758
50930.00.03566
58290.00.03372
66710.00.03178
76350.00.02986
87380.00.02797

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 134.5 – 100000