{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ir", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Ir(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1693, "q": 0.1387, "mu": 1.432, "epsilonL": 4.688e-05, "Eth": 134.5}, "E_min": 134.5, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
134.5	0.0	
153.9	0.0002244	
176.2	0.0007494	
201.6	0.00164	
230.7	0.00299	
264.1	0.004884	
302.2	0.007371	
345.9	0.01043	
395.8	0.01397	
453.0	0.01783	
518.4	0.02182	
593.3	0.02575	
679.0	0.02947	
777.1	0.0329	
889.4	0.036	
1018.0	0.03875	
1165.0	0.0412	
1333.0	0.04335	
1526.0	0.04526	
1746.0	0.04693	
1998.0	0.04841	
2287.0	0.0497	
2617.0	0.05081	
2995.0	0.05177	
3428.0	0.05256	
3923.0	0.05319	
4490.0	0.05367	
5139.0	0.05398	
5881.0	0.05413	
6730.0	0.05411	
7703.0	0.05392	
8815.0	0.05355	
10090.0	0.05302	
11550.0	0.05231	
13210.0	0.05143	
15120.0	0.05039	
17310.0	0.0492	
19810.0	0.04786	
22670.0	0.04639	
25940.0	0.0448	
29690.0	0.0431	
33980.0	0.04132	
38890.0	0.03948	
44510.0	0.03758	
50930.0	0.03566	
58290.0	0.03372	
66710.0	0.03178	
76350.0	0.02986	
87380.0	0.02797	
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