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Plasma-Surface Interaction Data Set 479

Sputtering of T+ on Ir(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Ir(pc) at 300 K

angle = 0.0 deg E /eV P
127.41.681e-28
146.09.12e-05
167.20.0003561
191.60.0008589
219.50.00168
251.50.002887
288.20.004511
330.20.006508
378.30.008764
433.40.01111
496.60.0134
568.90.01549
651.80.01732
746.80.01889
855.60.0202
980.30.02129
1123.00.02219
1287.00.02292
1474.00.02352
1689.00.024
1935.00.02437
2217.00.02464
2540.00.02483
2911.00.02492
3335.00.02492
3821.00.02484
4377.00.02468
5015.00.02443
5746.00.0241
6583.00.02369
7543.00.0232
8642.00.02264
9901.00.02201
11340.00.02132
13000.00.02057
14890.00.01978
17060.00.01895
19550.00.01809
22390.00.0172
25660.00.0163
29400.00.0154
33680.00.0145
38590.00.01361
44210.00.01274
50650.00.01188
58040.00.01106
66490.00.01026
76180.00.009498
87280.00.008771

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 127.4 – 100000