{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ir", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]} ------------------------------------------------------------------------ Sputtering of T+ on Ir(pc) at 300 K {"fit_function": "SPTEEX", "coeffs": {"lambda": 0.255, "q": 0.064, "mu": 1.631, "epsilonL": 9.519e-05, "Eth": 127.4}, "E_min": 127.4, "E_max": 100000} angle = 0.0 deg E /eV P 127.4 1.681e-28 146.0 9.12e-05 167.2 0.0003561 191.6 0.0008589 219.5 0.00168 251.5 0.002887 288.2 0.004511 330.2 0.006508 378.3 0.008764 433.4 0.01111 496.6 0.0134 568.9 0.01549 651.8 0.01732 746.8 0.01889 855.6 0.0202 980.3 0.02129 1123.0 0.02219 1287.0 0.02292 1474.0 0.02352 1689.0 0.024 1935.0 0.02437 2217.0 0.02464 2540.0 0.02483 2911.0 0.02492 3335.0 0.02492 3821.0 0.02484 4377.0 0.02468 5015.0 0.02443 5746.0 0.0241 6583.0 0.02369 7543.0 0.0232 8642.0 0.02264 9901.0 0.02201 11340.0 0.02132 13000.0 0.02057 14890.0 0.01978 17060.0 0.01895 19550.0 0.01809 22390.0 0.0172 25660.0 0.0163 29400.0 0.0154 33680.0 0.0145 38590.0 0.01361 44210.0 0.01274 50650.0 0.01188 58040.0 0.01106 66490.0 0.01026 76180.0 0.009498 87280.0 0.008771 -----