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Plasma-Surface Interaction Data Set 478

Sputtering of D+ on Ir(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Ir(pc) at 300 K

angle = 0.0 deg E /eV P
188.80.0
214.66.015e-05
243.90.0002379
277.20.000573
315.00.00111
358.00.001878
406.90.002874
462.50.004051
525.70.005324
597.40.006594
679.00.00778
771.80.008829
877.10.009721
996.90.01046
1133.00.01107
1288.00.01155
1464.00.01194
1664.00.01225
1891.00.01249
2149.00.01267
2442.00.01279
2776.00.01287
3155.00.0129
3586.00.01289
4076.00.01283
4632.00.01274
5265.00.0126
5984.00.01243
6801.00.01222
7729.00.01197
8785.00.01169
9985.00.01138
11350.00.01104
12900.00.01068
14660.00.01029
16660.00.009889
18940.00.00947
21520.00.00904
24460.00.008603
27800.00.008163
31600.00.007723
35910.00.007285
40820.00.006854
46390.00.006432
52730.00.00602
59930.00.005621
68110.00.005236
77410.00.004867
87980.00.004514

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 188.8 – 100000