{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Ir", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Ir(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2445, "q": 0.0332, "mu": 1.672, "epsilonL": 9.568e-05, "Eth": 188.8}, "E_min": 188.8, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
188.8	0.0	
214.6	6.015e-05	
243.9	0.0002379	
277.2	0.000573	
315.0	0.00111	
358.0	0.001878	
406.9	0.002874	
462.5	0.004051	
525.7	0.005324	
597.4	0.006594	
679.0	0.00778	
771.8	0.008829	
877.1	0.009721	
996.9	0.01046	
1133.0	0.01107	
1288.0	0.01155	
1464.0	0.01194	
1664.0	0.01225	
1891.0	0.01249	
2149.0	0.01267	
2442.0	0.01279	
2776.0	0.01287	
3155.0	0.0129	
3586.0	0.01289	
4076.0	0.01283	
4632.0	0.01274	
5265.0	0.0126	
5984.0	0.01243	
6801.0	0.01222	
7729.0	0.01197	
8785.0	0.01169	
9985.0	0.01138	
11350.0	0.01104	
12900.0	0.01068	
14660.0	0.01029	
16660.0	0.009889	
18940.0	0.00947	
21520.0	0.00904	
24460.0	0.008603	
27800.0	0.008163	
31600.0	0.007723	
35910.0	0.007285	
40820.0	0.006854	
46390.0	0.006432	
52730.0	0.00602	
59930.0	0.005621	
68110.0	0.005236	
77410.0	0.004867	
87980.0	0.004514	
-----