pwiDB

Plasma-Surface Interaction Data Set 475

Sputtering of Kr⁺ on Os(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr⁺ on Os(pc) at 300 K

angle = 0.0 deg	E /eV	P
	36.19	0.0
	42.54	0.0001342
	50.01	0.0008438
	58.79	0.00285
	69.1	0.007435
	81.23	0.01673
	95.49	0.03393
	112.3	0.06318
	132.0	0.1086
	155.1	0.1728
	182.4	0.2545
	214.4	0.3493
	252.0	0.4511
	296.2	0.5547
	348.2	0.6576
	409.3	0.7594
	481.2	0.8609
	565.6	0.9634
	664.9	1.069
	781.6	1.178
	918.8	1.291
	1080.0	1.411
	1270.0	1.537
	1493.0	1.669
	1755.0	1.809
	2063.0	1.956
	2425.0	2.11
	2850.0	2.272
	3350.0	2.441
	3939.0	2.616
	4630.0	2.798
	5443.0	2.986
	6398.0	3.179
	7521.0	3.376
	8841.0	3.578
	10390.0	3.783
	12220.0	3.989
	14360.0	4.197
	16880.0	4.404
	19850.0	4.609
	23330.0	4.812
	27420.0	5.01
	32240.0	5.202
	37900.0	5.386
	44550.0	5.561
	52370.0	5.725
	61560.0	5.876
	72370.0	6.012
	85070.0	6.131

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.114
q = 16.39
mu = 2.162
epsilonL = 1.537e-06
Eth = 36.19

Fit range

E = 36.19 – 100000