pwiDB

Plasma-Surface Interaction Data Set 474

Sputtering of Ar⁺ on Os(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ar⁺ on Os(pc) at 300 K

angle = 0.0 deg	E /eV	P
	32.11	0.0
	37.84	0.0001416
	44.59	0.000961
	52.54	0.0034
	61.92	0.009143
	72.96	0.02088
	85.98	0.04221
	101.3	0.07664
	119.4	0.1256
	140.7	0.1868
	165.8	0.255
	195.4	0.3247
	230.2	0.3926
	271.3	0.4577
	319.7	0.5205
	376.7	0.5823
	443.9	0.6441
	523.1	0.7072
	616.5	0.7721
	726.4	0.8394
	856.0	0.9095
	1009.0	0.9826
	1189.0	1.059
	1401.0	1.138
	1651.0	1.22
	1945.0	1.305
	2292.0	1.393
	2701.0	1.482
	3183.0	1.574
	3751.0	1.668
	4420.0	1.762
	5209.0	1.857
	6138.0	1.953
	7233.0	2.047
	8523.0	2.141
	10040.0	2.233
	11840.0	2.322
	13950.0	2.408
	16440.0	2.49
	19370.0	2.567
	22820.0	2.639
	26890.0	2.703
	31690.0	2.76
	37350.0	2.809
	44010.0	2.848
	51860.0	2.877
	61110.0	2.894
	72010.0	2.9
	84860.0	2.893

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0985
q = 7.415
mu = 2.254
epsilonL = 3.946e-06
Eth = 32.11

Fit range

E = 32.11 – 100000