{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Os", "surface_phase": "pc", "species": {"text": "Ar+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ar+ on Os(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0985, "q": 7.415, "mu": 2.254, "epsilonL": 3.946e-06, "Eth": 32.11}, "E_min": 32.11, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
32.11	0.0	
37.84	0.0001416	
44.59	0.000961	
52.54	0.0034	
61.92	0.009143	
72.96	0.02088	
85.98	0.04221	
101.3	0.07664	
119.4	0.1256	
140.7	0.1868	
165.8	0.255	
195.4	0.3247	
230.2	0.3926	
271.3	0.4577	
319.7	0.5205	
376.7	0.5823	
443.9	0.6441	
523.1	0.7072	
616.5	0.7721	
726.4	0.8394	
856.0	0.9095	
1009.0	0.9826	
1189.0	1.059	
1401.0	1.138	
1651.0	1.22	
1945.0	1.305	
2292.0	1.393	
2701.0	1.482	
3183.0	1.574	
3751.0	1.668	
4420.0	1.762	
5209.0	1.857	
6138.0	1.953	
7233.0	2.047	
8523.0	2.141	
10040.0	2.233	
11840.0	2.322	
13950.0	2.408	
16440.0	2.49	
19370.0	2.567	
22820.0	2.639	
26890.0	2.703	
31690.0	2.76	
37350.0	2.809	
44010.0	2.848	
51860.0	2.877	
61110.0	2.894	
72010.0	2.9	
84860.0	2.893	
-----