pwiDB

Plasma-Surface Interaction Data Set 473

Sputtering of Ne⁺ on Os(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Os(pc) at 300 K

angle = 0.0 deg	E /eV	P
	37.72	0.0
	44.3	0.0001816
	52.03	0.001153
	61.11	0.003879
	71.78	0.009933
	84.31	0.02149
	99.02	0.04078
	116.3	0.06894
	136.6	0.1048
	160.4	0.1451
	188.5	0.1863
	221.3	0.2259
	260.0	0.263
	305.4	0.2979
	358.6	0.3313
	421.2	0.3639
	494.8	0.3963
	581.1	0.4289
	682.6	0.4621
	801.7	0.4959
	941.6	0.5305
	1106.0	0.566
	1299.0	0.6022
	1526.0	0.639
	1792.0	0.6764
	2105.0	0.7143
	2472.0	0.7524
	2904.0	0.7905
	3410.0	0.8284
	4006.0	0.866
	4705.0	0.9028
	5526.0	0.9388
	6490.0	0.9735
	7623.0	1.007
	8954.0	1.038
	10520.0	1.067
	12350.0	1.094
	14510.0	1.118
	17040.0	1.138
	20010.0	1.156
	23510.0	1.169
	27610.0	1.178
	32430.0	1.182
	38090.0	1.182
	44740.0	1.176
	52550.0	1.166
	61720.0	1.15
	72490.0	1.129
	85140.0	1.103

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0816
q = 3.024
mu = 2.183
epsilonL = 8.144e-06
Eth = 37.72

Fit range

E = 37.72 – 100000