{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Os", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Ne+ on Os(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0816, "q": 3.024, "mu": 2.183, "epsilonL": 8.144e-06, "Eth": 37.72}, "E_min": 37.72, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
37.72	0.0	
44.3	0.0001816	
52.03	0.001153	
61.11	0.003879	
71.78	0.009933	
84.31	0.02149	
99.02	0.04078	
116.3	0.06894	
136.6	0.1048	
160.4	0.1451	
188.5	0.1863	
221.3	0.2259	
260.0	0.263	
305.4	0.2979	
358.6	0.3313	
421.2	0.3639	
494.8	0.3963	
581.1	0.4289	
682.6	0.4621	
801.7	0.4959	
941.6	0.5305	
1106.0	0.566	
1299.0	0.6022	
1526.0	0.639	
1792.0	0.6764	
2105.0	0.7143	
2472.0	0.7524	
2904.0	0.7905	
3410.0	0.8284	
4006.0	0.866	
4705.0	0.9028	
5526.0	0.9388	
6490.0	0.9735	
7623.0	1.007	
8954.0	1.038	
10520.0	1.067	
12350.0	1.094	
14510.0	1.118	
17040.0	1.138	
20010.0	1.156	
23510.0	1.169	
27610.0	1.178	
32430.0	1.182	
38090.0	1.182	
44740.0	1.176	
52550.0	1.166	
61720.0	1.15	
72490.0	1.129	
85140.0	1.103	
-----