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Plasma-Surface Interaction Data Set 472

Sputtering of 4He+ on Os(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Os(pc) at 300 K

angle = 0.0 deg E /eV P
115.80.0
132.90.0001095
152.60.0005296
175.10.001455
201.10.003107
230.80.005659
265.00.009118
304.20.01326
349.20.0177
400.80.02204
460.10.02599
528.20.02944
606.40.03241
696.10.03496
799.10.03717
917.30.03911
1053.00.04084
1209.00.0424
1388.00.04381
1593.00.04511
1829.00.04628
2099.00.04735
2410.00.0483
2766.00.04914
3176.00.04986
3646.00.05045
4185.00.05091
4804.00.05123
5515.00.05139
6331.00.05141
7268.00.05126
8343.00.05094
9578.00.05046
10990.00.04982
12620.00.049
14490.00.04803
16630.00.0469
19090.00.04562
21920.00.04422
25160.00.04269
28880.00.04106
33160.00.03934
38060.00.03756
43700.00.03572
50160.00.03385
57580.00.03197
66100.00.03009
75880.00.02823
87110.00.02641

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 115.8 – 100000