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Plasma-Surface Interaction Data Set 471

Sputtering of 3He+ on Os(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Os(pc) at 300 K

angle = 0.0 deg E /eV P
152.60.0
174.20.0001027
198.90.0004019
227.00.0009727
259.10.001916
295.80.003338
337.60.005315
385.40.007866
440.00.01092
502.20.01431
573.30.01783
654.40.02128
747.00.0245
852.70.0274
973.40.02995
1111.00.03217
1268.00.03409
1448.00.03575
1653.00.03719
1887.00.03844
2154.00.03952
2458.00.04045
2806.00.04125
3203.00.04192
3656.00.04246
4174.00.04288
4764.00.04317
5439.00.04334
6208.00.04338
7087.00.0433
8090.00.04308
9234.00.04272
10540.00.04224
12030.00.04162
13740.00.04088
15680.00.04001
17900.00.03902
20430.00.03793
23320.00.03674
26620.00.03546
30390.00.03411
34690.00.03269
39600.00.03123
45200.00.02974
51600.00.02822
58900.00.02669
67230.00.02517
76740.00.02367
87600.00.02219

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 152.6 – 100000