{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Os", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of (3He)+ on Os(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2226, "q": 0.1111, "mu": 1.637, "epsilonL": 4.768e-05, "Eth": 152.6}, "E_min": 152.6, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
152.6	0.0	
174.2	0.0001027	
198.9	0.0004019	
227.0	0.0009727	
259.1	0.001916	
295.8	0.003338	
337.6	0.005315	
385.4	0.007866	
440.0	0.01092	
502.2	0.01431	
573.3	0.01783	
654.4	0.02128	
747.0	0.0245	
852.7	0.0274	
973.4	0.02995	
1111.0	0.03217	
1268.0	0.03409	
1448.0	0.03575	
1653.0	0.03719	
1887.0	0.03844	
2154.0	0.03952	
2458.0	0.04045	
2806.0	0.04125	
3203.0	0.04192	
3656.0	0.04246	
4174.0	0.04288	
4764.0	0.04317	
5439.0	0.04334	
6208.0	0.04338	
7087.0	0.0433	
8090.0	0.04308	
9234.0	0.04272	
10540.0	0.04224	
12030.0	0.04162	
13740.0	0.04088	
15680.0	0.04001	
17900.0	0.03902	
20430.0	0.03793	
23320.0	0.03674	
26620.0	0.03546	
30390.0	0.03411	
34690.0	0.03269	
39600.0	0.03123	
45200.0	0.02974	
51600.0	0.02822	
58900.0	0.02669	
67230.0	0.02517	
76740.0	0.02367	
87600.0	0.02219	
-----