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Plasma-Surface Interaction Data Set 469

Sputtering of D+ on Os(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Os(pc) at 300 K

angle = 0.0 deg E /eV P
232.80.0
263.40.0001046
298.10.0003116
337.40.0006273
381.90.001065
432.20.00163
489.10.002317
553.50.003105
626.40.00396
708.90.004839
802.30.005701
907.90.006511
1028.00.007244
1163.00.007888
1316.00.008439
1489.00.008901
1686.00.00928
1907.00.009583
2159.00.00982
2443.00.009997
2765.00.01012
3129.00.01019
3541.00.01023
4008.00.01021
4535.00.01017
5133.00.01008
5809.00.009965
6574.00.009816
7440.00.009637
8420.00.009431
9529.00.009199
10780.00.008945
12200.00.00867
13810.00.008377
15630.00.008069
17690.00.007748
20020.00.007418
22660.00.007081
25640.00.006741
29020.00.006398
32840.00.006057
37160.00.005719
42060.00.005386
47600.00.00506
53870.00.004743
60960.00.004436
68990.00.00414
78080.00.003856
88360.00.003584

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 232.8 – 100000