{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Os", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of D+ on Os(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2692, "q": 0.0267, "mu": 1.319, "epsilonL": 9.733e-05, "Eth": 232.8}, "E_min": 232.8, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
232.8	0.0	
263.4	0.0001046	
298.1	0.0003116	
337.4	0.0006273	
381.9	0.001065	
432.2	0.00163	
489.1	0.002317	
553.5	0.003105	
626.4	0.00396	
708.9	0.004839	
802.3	0.005701	
907.9	0.006511	
1028.0	0.007244	
1163.0	0.007888	
1316.0	0.008439	
1489.0	0.008901	
1686.0	0.00928	
1907.0	0.009583	
2159.0	0.00982	
2443.0	0.009997	
2765.0	0.01012	
3129.0	0.01019	
3541.0	0.01023	
4008.0	0.01021	
4535.0	0.01017	
5133.0	0.01008	
5809.0	0.009965	
6574.0	0.009816	
7440.0	0.009637	
8420.0	0.009431	
9529.0	0.009199	
10780.0	0.008945	
12200.0	0.00867	
13810.0	0.008377	
15630.0	0.008069	
17690.0	0.007748	
20020.0	0.007418	
22660.0	0.007081	
25640.0	0.006741	
29020.0	0.006398	
32840.0	0.006057	
37160.0	0.005719	
42060.0	0.005386	
47600.0	0.00506	
53870.0	0.004743	
60960.0	0.004436	
68990.0	0.00414	
78080.0	0.003856	
88360.0	0.003584	
-----