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Plasma-Surface Interaction Data Set 467

Sputtering of Xe+ on Re(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe+ on Re(pc) at 300 K

angle = 0.0 deg E /eV P
42.670.0
49.999.621e-05
58.570.0006097
68.620.002067
80.390.005413
94.190.01226
110.30.02517
129.30.04778
151.50.08456
177.50.1397
207.90.2154
243.60.3101
285.40.419
334.30.5358
391.70.6554
458.90.7752
537.60.8947
629.91.015
738.01.137
864.61.263
1013.01.395
1187.01.532
1390.01.678
1629.01.831
1908.01.994
2236.02.167
2620.02.349
3069.02.542
3596.02.745
4212.02.958
4935.03.182
5782.03.415
6774.03.658
7937.03.911
9298.04.172
10890.04.441
12760.04.716
14950.04.998
17520.05.285
20520.05.575
24050.05.867
28170.06.16
33010.06.452
38670.06.741
45300.07.025
53080.07.302
62180.07.57
72850.07.827
85350.08.071

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 42.67 – 100000