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Plasma-Surface Interaction Data Set 466

Sputtering of Kr+ on Re(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Kr+ on Re(pc) at 300 K

angle = 0.0 deg E /eV P
35.890.0
42.20.0001414
49.610.0008591
58.330.002838
68.580.007285
80.640.01618
94.810.0325
111.50.06011
131.10.103
154.10.1639
181.20.2423
213.00.3344
250.40.4345
294.40.5377
346.20.6408
407.00.7431
478.50.8451
562.60.948
661.51.053
777.71.162
914.41.275
1075.01.394
1264.01.519
1486.01.651
1747.01.789
2054.01.935
2415.02.088
2840.02.248
3339.02.415
3925.02.588
4615.02.768
5426.02.954
6380.03.145
7501.03.341
8819.03.54
10370.03.742
12190.03.946
14330.04.151
16850.04.356
19810.04.559
23290.04.759
27390.04.954
32200.05.143
37860.05.325
44510.05.497
52330.05.659
61530.05.807
72340.05.941
85050.06.057

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 35.89 – 100000