{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Re", "surface_phase": "pc", "species": {"text": "Kr+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Kr+ on Re(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1159, "q": 16.17, "mu": 2.117, "epsilonL": 1.552e-06, "Eth": 35.89}, "E_min": 35.89, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
35.89	0.0	
42.2	0.0001414	
49.61	0.0008591	
58.33	0.002838	
68.58	0.007285	
80.64	0.01618	
94.81	0.0325	
111.5	0.06011	
131.1	0.103	
154.1	0.1639	
181.2	0.2423	
213.0	0.3344	
250.4	0.4345	
294.4	0.5377	
346.2	0.6408	
407.0	0.7431	
478.5	0.8451	
562.6	0.948	
661.5	1.053	
777.7	1.162	
914.4	1.275	
1075.0	1.394	
1264.0	1.519	
1486.0	1.651	
1747.0	1.789	
2054.0	1.935	
2415.0	2.088	
2840.0	2.248	
3339.0	2.415	
3925.0	2.588	
4615.0	2.768	
5426.0	2.954	
6380.0	3.145	
7501.0	3.341	
8819.0	3.54	
10370.0	3.742	
12190.0	3.946	
14330.0	4.151	
16850.0	4.356	
19810.0	4.559	
23290.0	4.759	
27390.0	4.954	
32200.0	5.143	
37860.0	5.325	
44510.0	5.497	
52330.0	5.659	
61530.0	5.807	
72340.0	5.941	
85050.0	6.057	
-----