pwiDB

Plasma-Surface Interaction Data Set 464

Sputtering of Ne⁺ on Re(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Ne⁺ on Re(pc) at 300 K

angle = 0.0 deg	E /eV	P
	37.83	1.16e-32
	44.43	0.0002822
	52.18	0.001438
	61.28	0.004211
	71.97	0.009742
	84.53	0.01954
	99.28	0.03526
	116.6	0.05813
	136.9	0.08822
	160.8	0.1242
	188.9	0.1637
	221.8	0.2042
	260.6	0.2441
	306.0	0.2826
	359.4	0.3196
	422.1	0.3554
	495.7	0.3905
	582.2	0.4253
	683.8	0.4601
	803.1	0.4952
	943.2	0.5309
	1108.0	0.567
	1301.0	0.6037
	1528.0	0.641
	1795.0	0.6787
	2108.0	0.7167
	2476.0	0.7548
	2907.0	0.793
	3415.0	0.8309
	4010.0	0.8684
	4710.0	0.9052
	5532.0	0.941
	6497.0	0.9755
	7630.0	1.008
	8962.0	1.04
	10530.0	1.069
	12360.0	1.095
	14520.0	1.118
	17050.0	1.139
	20030.0	1.155
	23520.0	1.168
	27620.0	1.177
	32440.0	1.181
	38100.0	1.18
	44750.0	1.174
	52560.0	1.163
	61730.0	1.147
	72500.0	1.125
	85150.0	1.099

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.0871
q = 3.02
mu = 1.901
epsilonL = 8.265e-06
Eth = 37.83

Fit range

E = 37.83 – 100000