{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Re", "surface_phase": "pc", "species": {"text": "Ne+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of Ne+ on Re(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.0871, "q": 3.02, "mu": 1.901, "epsilonL": 8.265e-06, "Eth": 37.83}, "E_min": 37.83, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
37.83	1.16e-32	
44.43	0.0002822	
52.18	0.001438	
61.28	0.004211	
71.97	0.009742	
84.53	0.01954	
99.28	0.03526	
116.6	0.05813	
136.9	0.08822	
160.8	0.1242	
188.9	0.1637	
221.8	0.2042	
260.6	0.2441	
306.0	0.2826	
359.4	0.3196	
422.1	0.3554	
495.7	0.3905	
582.2	0.4253	
683.8	0.4601	
803.1	0.4952	
943.2	0.5309	
1108.0	0.567	
1301.0	0.6037	
1528.0	0.641	
1795.0	0.6787	
2108.0	0.7167	
2476.0	0.7548	
2907.0	0.793	
3415.0	0.8309	
4010.0	0.8684	
4710.0	0.9052	
5532.0	0.941	
6497.0	0.9755	
7630.0	1.008	
8962.0	1.04	
10530.0	1.069	
12360.0	1.095	
14520.0	1.118	
17050.0	1.139	
20030.0	1.155	
23520.0	1.168	
27620.0	1.177	
32440.0	1.181	
38100.0	1.18	
44750.0	1.174	
52560.0	1.163	
61730.0	1.147	
72500.0	1.125	
85150.0	1.099	
-----