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Plasma-Surface Interaction Data Set 463

Sputtering of 4He+ on Re(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 4He+ on Re(pc) at 300 K

angle = 0.0 deg E /eV P
115.60.0
132.70.000176
152.30.0006818
174.90.001627
200.70.003136
230.40.00529
264.50.008079
303.70.01137
348.60.01496
400.20.01858
459.50.02204
527.50.02522
605.60.02805
695.20.03055
798.10.03275
916.20.0347
1052.00.03642
1207.00.03797
1386.00.03936
1591.00.04061
1827.00.04174
2097.00.04275
2408.00.04364
2764.00.04442
3173.00.04508
3642.00.04562
4182.00.04603
4800.00.04631
5511.00.04646
6327.00.04646
7263.00.04631
8338.00.04601
9572.00.04556
10990.00.04496
12610.00.04421
14480.00.04331
16620.00.04227
19090.00.04111
21910.00.03982
25150.00.03843
28880.00.03694
33150.00.03538
38050.00.03376
43690.00.03209
50150.00.0304
57570.00.0287
66100.00.027
75880.00.02533
87110.00.02368

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 115.6 – 100000