{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Re", "surface_phase": "pc", "species": {"text": "(4He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (4He)+ on Re(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1179, "q": 0.1189, "mu": 1.623, "epsilonL": 4.825e-05, "Eth": 115.6}, "E_min": 115.6, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
115.6	0.0	
132.7	0.000176	
152.3	0.0006818	
174.9	0.001627	
200.7	0.003136	
230.4	0.00529	
264.5	0.008079	
303.7	0.01137	
348.6	0.01496	
400.2	0.01858	
459.5	0.02204	
527.5	0.02522	
605.6	0.02805	
695.2	0.03055	
798.1	0.03275	
916.2	0.0347	
1052.0	0.03642	
1207.0	0.03797	
1386.0	0.03936	
1591.0	0.04061	
1827.0	0.04174	
2097.0	0.04275	
2408.0	0.04364	
2764.0	0.04442	
3173.0	0.04508	
3642.0	0.04562	
4182.0	0.04603	
4800.0	0.04631	
5511.0	0.04646	
6327.0	0.04646	
7263.0	0.04631	
8338.0	0.04601	
9572.0	0.04556	
10990.0	0.04496	
12610.0	0.04421	
14480.0	0.04331	
16620.0	0.04227	
19090.0	0.04111	
21910.0	0.03982	
25150.0	0.03843	
28880.0	0.03694	
33150.0	0.03538	
38050.0	0.03376	
43690.0	0.03209	
50150.0	0.0304	
57570.0	0.0287	
66100.0	0.027	
75880.0	0.02533	
87110.0	0.02368	
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