Return to search

Plasma-Surface Interaction Data Set 462

Sputtering of 3He+ on Re(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of 3He+ on Re(pc) at 300 K

angle = 0.0 deg E /eV P
151.95.622e-27
173.40.0001437
197.90.000509
225.90.001156
257.90.002168
294.50.003627
336.20.005586
383.80.008045
438.10.01093
500.20.01412
571.00.01743
651.90.02068
744.20.02376
849.60.02657
969.90.02908
1107.00.03129
1264.00.03322
1443.00.0349
1648.00.03636
1881.00.03763
2147.00.03873
2451.00.03968
2798.00.04049
3195.00.04116
3647.00.0417
4164.00.04212
4753.00.04241
5427.00.04258
6195.00.04261
7072.00.04252
8074.00.04229
9217.00.04193
10520.00.04144
12010.00.04082
13710.00.04008
15660.00.03921
17870.00.03823
20410.00.03715
23300.00.03596
26590.00.0347
30360.00.03336
34660.00.03196
39570.00.03052
45170.00.02904
51570.00.02755
58870.00.02605
67210.00.02456
76730.00.02308
87590.00.02163

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 151.9 – 100000