{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Re", "surface_phase": "pc", "species": {"text": "(3He)+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of (3He)+ on Re(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2026, "q": 0.1092, "mu": 1.51, "epsilonL": 4.849e-05, "Eth": 151.9}, "E_min": 151.9, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
151.9	5.622e-27	
173.4	0.0001437	
197.9	0.000509	
225.9	0.001156	
257.9	0.002168	
294.5	0.003627	
336.2	0.005586	
383.8	0.008045	
438.1	0.01093	
500.2	0.01412	
571.0	0.01743	
651.9	0.02068	
744.2	0.02376	
849.6	0.02657	
969.9	0.02908	
1107.0	0.03129	
1264.0	0.03322	
1443.0	0.0349	
1648.0	0.03636	
1881.0	0.03763	
2147.0	0.03873	
2451.0	0.03968	
2798.0	0.04049	
3195.0	0.04116	
3647.0	0.0417	
4164.0	0.04212	
4753.0	0.04241	
5427.0	0.04258	
6195.0	0.04261	
7072.0	0.04252	
8074.0	0.04229	
9217.0	0.04193	
10520.0	0.04144	
12010.0	0.04082	
13710.0	0.04008	
15660.0	0.03921	
17870.0	0.03823	
20410.0	0.03715	
23300.0	0.03596	
26590.0	0.0347	
30360.0	0.03336	
34660.0	0.03196	
39570.0	0.03052	
45170.0	0.02904	
51570.0	0.02755	
58870.0	0.02605	
67210.0	0.02456	
76730.0	0.02308	
87590.0	0.02163	
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