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Plasma-Surface Interaction Data Set 461

Sputtering of T+ on Re(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of T+ on Re(pc) at 300 K

angle = 0.0 deg E /eV P
143.93.755e-30
164.45.807e-05
187.90.0002441
214.80.0006151
245.50.00124
280.50.002178
320.60.00345
366.40.005015
418.80.006763
478.60.008551
547.00.01025
625.20.01176
714.50.01306
816.60.01414
933.30.01502
1067.00.01574
1219.00.01632
1393.00.01679
1592.00.01716
1820.00.01745
2080.00.01767
2377.00.01781
2716.00.0179
3105.00.01792
3548.00.01788
4055.00.01778
4634.00.01763
5297.00.01741
6053.00.01714
6918.00.01682
7907.00.01644
9036.00.01602
10330.00.01555
11800.00.01504
13490.00.01449
15420.00.01392
17620.00.01332
20140.00.0127
23010.00.01207
26300.00.01144
30060.00.0108
34360.00.01017
39260.00.009542
44870.00.008931
51290.00.008335
58610.00.007759
66990.00.007205
76560.00.006674
87500.00.006168

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 143.9 – 100000