{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Re", "surface_phase": "pc", "species": {"text": "T+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of T+ on Re(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.2667, "q": 0.046, "mu": 1.732, "epsilonL": 9.849e-05, "Eth": 143.9}, "E_min": 143.9, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
143.9	3.755e-30	
164.4	5.807e-05	
187.9	0.0002441	
214.8	0.0006151	
245.5	0.00124	
280.5	0.002178	
320.6	0.00345	
366.4	0.005015	
418.8	0.006763	
478.6	0.008551	
547.0	0.01025	
625.2	0.01176	
714.5	0.01306	
816.6	0.01414	
933.3	0.01502	
1067.0	0.01574	
1219.0	0.01632	
1393.0	0.01679	
1592.0	0.01716	
1820.0	0.01745	
2080.0	0.01767	
2377.0	0.01781	
2716.0	0.0179	
3105.0	0.01792	
3548.0	0.01788	
4055.0	0.01778	
4634.0	0.01763	
5297.0	0.01741	
6053.0	0.01714	
6918.0	0.01682	
7907.0	0.01644	
9036.0	0.01602	
10330.0	0.01555	
11800.0	0.01504	
13490.0	0.01449	
15420.0	0.01392	
17620.0	0.01332	
20140.0	0.0127	
23010.0	0.01207	
26300.0	0.01144	
30060.0	0.0108	
34360.0	0.01017	
39260.0	0.009542	
44870.0	0.008931	
51290.0	0.008335	
58610.0	0.007759	
66990.0	0.007205	
76560.0	0.006674	
87500.0	0.006168	
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