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Plasma-Surface Interaction Data Set 460

Sputtering of D+ on Re(pc) at 300 K

  1. B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of D+ on Re(pc) at 300 K

angle = 0.0 deg E /eV P
214.30.0
243.03.87e-05
275.40.0001521
312.20.000366
354.00.0007127
401.30.001221
454.90.001902
515.70.002743
584.60.003698
662.70.004701
751.20.005681
851.60.006582
965.40.00737
1094.00.008034
1241.00.008579
1406.00.009016
1594.00.009361
1807.00.009627
2049.00.009828
2323.00.009973
2633.00.01007
2985.00.01012
3384.00.01013
3836.00.01011
4348.00.01005
4929.00.00996
5588.00.009837
6335.00.009685
7181.00.009505
8140.00.009299
9228.00.009067
10460.00.008814
11860.00.00854
13440.00.008248
15240.00.007941
17280.00.007622
19580.00.007294
22200.00.006958
25170.00.006619
28530.00.006278
32340.00.005939
36670.00.005602
41560.00.005271
47120.00.004948
53410.00.004633
60550.00.004328
68640.00.004035
77820.00.003753
88210.00.003485

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]
Coefficients
Fit range

E = 214.3 – 100000