{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "Re", "surface_phase": "pc", "species": {"text": "D+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of D+ on Re(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.3445, "q": 0.0262, "mu": 1.664, "epsilonL": 9.902e-05, "Eth": 214.3}, "E_min": 214.3, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
214.3	0.0	
243.0	3.87e-05	
275.4	0.0001521	
312.2	0.000366	
354.0	0.0007127	
401.3	0.001221	
454.9	0.001902	
515.7	0.002743	
584.6	0.003698	
662.7	0.004701	
751.2	0.005681	
851.6	0.006582	
965.4	0.00737	
1094.0	0.008034	
1241.0	0.008579	
1406.0	0.009016	
1594.0	0.009361	
1807.0	0.009627	
2049.0	0.009828	
2323.0	0.009973	
2633.0	0.01007	
2985.0	0.01012	
3384.0	0.01013	
3836.0	0.01011	
4348.0	0.01005	
4929.0	0.00996	
5588.0	0.009837	
6335.0	0.009685	
7181.0	0.009505	
8140.0	0.009299	
9228.0	0.009067	
10460.0	0.008814	
11860.0	0.00854	
13440.0	0.008248	
15240.0	0.007941	
17280.0	0.007622	
19580.0	0.007294	
22200.0	0.006958	
25170.0	0.006619	
28530.0	0.006278	
32340.0	0.005939	
36670.0	0.005602	
41560.0	0.005271	
47120.0	0.004948	
53410.0	0.004633	
60550.0	0.004328	
68640.0	0.004035	
77820.0	0.003753	
88210.0	0.003485	
-----