pwiDB

Plasma-Surface Interaction Data Set 458

Sputtering of W⁺ on W(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of W⁺ on W(pc) at 300 K

angle = 0.0 deg	E /eV	P
	24.99	7.009e-54
	29.6	3.773e-07
	35.06	5.145e-06
	41.52	2.874e-05
	49.18	0.0001119
	58.25	0.000358
	69.0	0.001013
	81.72	0.002631
	96.8	0.006387
	114.7	0.01458
	135.8	0.03117
	160.8	0.0615
	190.5	0.1099
	225.7	0.1755
	267.3	0.251
	316.6	0.3277
	375.0	0.401
	444.1	0.471
	526.0	0.5395
	623.1	0.609
	738.0	0.6815
	874.1	0.7585
	1035.0	0.8411
	1226.0	0.9301
	1452.0	1.026
	1720.0	1.13
	2038.0	1.242
	2414.0	1.362
	2859.0	1.491
	3386.0	1.629
	4011.0	1.777
	4750.0	1.934
	5626.0	2.1
	6664.0	2.276
	7893.0	2.462
	9349.0	2.657
	11070.0	2.86
	13120.0	3.072
	15540.0	3.291
	18400.0	3.518
	21800.0	3.751
	25820.0	3.989
	30580.0	4.231
	36220.0	4.476
	42900.0	4.722
	50810.0	4.969
	60180.0	5.213
	71280.0	5.454
	84430.0	5.689

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 2.27
q = 18.6
mu = 3.127
epsilonL = 5.004e-07
Eth = 24.99

Fit range

E = 24.99 – 100000