{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "W+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
------------------------------------------------------------------------
Sputtering of W+ on W(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 2.27, "q": 18.6, "mu": 3.127, "epsilonL": 5.004e-07, "Eth": 24.99}, "E_min": 24.99, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
24.99	7.009e-54	
29.6	3.773e-07	
35.06	5.145e-06	
41.52	2.874e-05	
49.18	0.0001119	
58.25	0.000358	
69.0	0.001013	
81.72	0.002631	
96.8	0.006387	
114.7	0.01458	
135.8	0.03117	
160.8	0.0615	
190.5	0.1099	
225.7	0.1755	
267.3	0.251	
316.6	0.3277	
375.0	0.401	
444.1	0.471	
526.0	0.5395	
623.1	0.609	
738.0	0.6815	
874.1	0.7585	
1035.0	0.8411	
1226.0	0.9301	
1452.0	1.026	
1720.0	1.13	
2038.0	1.242	
2414.0	1.362	
2859.0	1.491	
3386.0	1.629	
4011.0	1.777	
4750.0	1.934	
5626.0	2.1	
6664.0	2.276	
7893.0	2.462	
9349.0	2.657	
11070.0	2.86	
13120.0	3.072	
15540.0	3.291	
18400.0	3.518	
21800.0	3.751	
25820.0	3.989	
30580.0	4.231	
36220.0	4.476	
42900.0	4.722	
50810.0	4.969	
60180.0	5.213	
71280.0	5.454	
84430.0	5.689	
-----