pwiDB

Plasma-Surface Interaction Data Set 457

Sputtering of Xe⁺ on W(pc) at 300 K

B144: W. Eckstein, "Sputtering Yields. In: Sputtering by Particle Bombardment", Topics in Applied Physics 110 (2007). [https://doi.org/10.1007/978-3-540-44502-9_3]

Sputtering of Xe⁺ on W(pc) at 300 K

angle = 0.0 deg	E /eV	P
	44.87	0.0
	52.52	9.86e-05
	61.46	0.0005839
	71.93	0.001895
	84.19	0.004799
	98.54	0.01058
	115.3	0.02123
	135.0	0.03962
	158.0	0.0693
	184.9	0.1139
	216.4	0.1759
	253.3	0.2552
	296.4	0.3487
	346.9	0.4517
	406.0	0.5595
	475.2	0.6689
	556.2	0.7785
	650.9	0.8885
	761.8	0.9999
	891.6	1.114
	1044.0	1.232
	1221.0	1.355
	1429.0	1.484
	1673.0	1.62
	1958.0	1.764
	2292.0	1.916
	2682.0	2.076
	3139.0	2.244
	3674.0	2.422
	4300.0	2.608
	5032.0	2.803
	5890.0	3.006
	6893.0	3.218
	8068.0	3.437
	9443.0	3.664
	11050.0	3.897
	12930.0	4.136
	15140.0	4.38
	17720.0	4.628
	20740.0	4.879
	24270.0	5.131
	28400.0	5.384
	33240.0	5.636
	38910.0	5.885
	45540.0	6.13
	53300.0	6.369
	62380.0	6.599
	73000.0	6.821
	85440.0	7.03

Fit Function: SPTEEX

\[Y(E) = \frac{q}{2} \frac{\left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \ln(1 + 1.2288\epsilon)}{\lambda + \left( \frac{E}{E_\mathrm{th}} - 1 \right)^\mu \left[ \epsilon + 0.1728\sqrt{\epsilon} + 0.008\epsilon^{0.1504} \right]}\]

Coefficients

lambda = 0.1385
q = 20.53
mu = 2.095
epsilonL = 8.408e-07
Eth = 44.87

Fit range

E = 44.87 – 100000