{"process": "Sputtering", "process_types": [{"abbreviation": "MPS", "description": "Physical Sputtering"}, {"abbreviation": "MSP", "description": "Sputtering"}], "surface": "W", "surface_phase": "pc", "species": {"text": "Xe+", "charge": 1}, "temperature": 300, "comment": "Eckstein equation (2) is incorrect; use formula given on p.18 of APID-7B", "refs": [{"id": 144, "authors": "W. Eckstein", "title": "Sputtering Yields. In: Sputtering by Particle Bombardment", "journal": "Topics in Applied Physics", "volume": "110", "page_start": "", "page_end": "", "article_number": "", "year": 2007, "note": "Springer, Berlin, Heidelberg", "doi": "https://doi.org/10.1007/978-3-540-44502-9_3", "bibcode": "", "url": ""}]}
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Sputtering of Xe+ on W(pc) at 300 K
{"fit_function": "SPTEEX", "coeffs": {"lambda": 0.1385, "q": 20.53, "mu": 2.095, "epsilonL": 8.408e-07, "Eth": 44.87}, "E_min": 44.87, "E_max": 100000}
angle = 0.0 deg
E /eV	P	
44.87	0.0	
52.52	9.86e-05	
61.46	0.0005839	
71.93	0.001895	
84.19	0.004799	
98.54	0.01058	
115.3	0.02123	
135.0	0.03962	
158.0	0.0693	
184.9	0.1139	
216.4	0.1759	
253.3	0.2552	
296.4	0.3487	
346.9	0.4517	
406.0	0.5595	
475.2	0.6689	
556.2	0.7785	
650.9	0.8885	
761.8	0.9999	
891.6	1.114	
1044.0	1.232	
1221.0	1.355	
1429.0	1.484	
1673.0	1.62	
1958.0	1.764	
2292.0	1.916	
2682.0	2.076	
3139.0	2.244	
3674.0	2.422	
4300.0	2.608	
5032.0	2.803	
5890.0	3.006	
6893.0	3.218	
8068.0	3.437	
9443.0	3.664	
11050.0	3.897	
12930.0	4.136	
15140.0	4.38	
17720.0	4.628	
20740.0	4.879	
24270.0	5.131	
28400.0	5.384	
33240.0	5.636	
38910.0	5.885	
45540.0	6.13	
53300.0	6.369	
62380.0	6.599	
73000.0	6.821	
85440.0	7.03	
-----